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OCCI Lecture: Professor Gregory N. Parsons
January 19, 2018 at 10:00 AM to 11:30 AM
| Location: | 202 Tory Building |
| Cost: | Free |
Chemical Selectivity in Surface Deposition Reactions
Professor Gregory N. Parsons,
Department of Chemical and Biomolecular Engineering, North Carolina State University
Selectivity in chemical reactions, where one product is formed and a similar product is suppressed, is a long-standing challenge in reaction engineering. Catalytic reactions, for example, quantify selectivity in terms of the rate of formation of a desired product relative to that for an undesired product. In the field of nano-scale electronic devices, the need for localized material placement and lateral position control is now reaching the point where long-standing physical patterning tools (i.e. photolithography) need to be augmented by new purely chemical patterning methods. Chemical patterning proceeds via area-selective deposition, where a chemical product (i.e. a thin film) forms on one part of a patterned surface, but not on other parts of the same surface. To meet the demands for defect-free electronic devices, the stringency for selective deposition is much more intense than the selectivity used in typical catalysis or other chemical systems.
In this presentation, I will describe the basic surface chemistry of selective reactions in vapor/surface atomic layer deposition and atomic layer etching, and show how we are using these tools to push the boundaries of selectivity in surface chemical reactions.