{"id":184,"date":"2020-01-09T17:06:07","date_gmt":"2020-01-09T22:06:07","guid":{"rendered":"https:\/\/carleton.ca\/nanofab\/?post_type=cu-people&p=184"},"modified":"2020-03-26T13:32:16","modified_gmt":"2020-03-26T17:32:16","slug":"covap","status":"publish","type":"cu-people","link":"https:\/\/carleton.ca\/nanofab\/people\/covap\/","title":{"rendered":"COVAP"},"content":{"rendered":"

The Angstrom Covap PVD platform offers a compact, robust solution for many process applications. Deposition sources are isolated to reduce thermal effects and cross contamination.<\/p>\n

Integrated into a dedicated MBraun drybox, the COVAP produces repeatable, high quality PVD thin films of elemental materials, compounds, and alloys.<\/p>\n

Four sources are available for sequential or co-deposition recipes, with deposition rates calibrated by in-situ quartz crystal microbalances (QCMs).<\/p>\n

The tool can accommodate substrate sizes of up to 100 mm in diameter.<\/p>\n","protected":false},"template":"","meta":{"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","_mi_skip_tracking":false,"_exactmetrics_sitenote_active":false,"_exactmetrics_sitenote_note":"","_exactmetrics_sitenote_category":0,"_links_to":"","_links_to_target":""},"people-type":[],"yoast_head":"\nCOVAP - CU Nanofab<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/carleton.ca\/nanofab\/people\/covap\/\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/carleton.ca\/nanofab\/people\/covap\/\",\"url\":\"https:\/\/carleton.ca\/nanofab\/people\/covap\/\",\"name\":\"COVAP - 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