{"id":241,"date":"2020-08-03T13:29:47","date_gmt":"2020-08-03T17:29:47","guid":{"rendered":"https:\/\/carleton.ca\/nanofab\/?post_type=cu_people&#038;p=241"},"modified":"2026-08-04T09:55:00","modified_gmt":"2026-08-04T13:55:00","slug":"thermal-ald","status":"publish","type":"cu_people","link":"https:\/\/carleton.ca\/nanofab\/people\/thermal-ald\/","title":{"rendered":"Thermal ALD"},"content":{"rendered":"<header class=\"mb-6 cu-pageheader cu-component-updated md:mb-12\">\n    <h1 class=\"cu-prose-first-last font-semibold !mt-2 mb-4 md:mb-6 text-3xl md:text-4xl lg:text-5xl lg:leading-[3.5rem] relative after:absolute after:h-px after:bottom-0 pb-5 after:w-10 after:bg-cu-red after:left-px\">\n                    \n             \n                \n            <\/h1>\n\n    \n    <\/header>\n\n\n\n<p class=\"wp-block-paragraph\">We have two thermal Picosun tools.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Typical substrate size and type<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>50-200 mm diameter wafers or similarly thin substrates.<\/li>\n\n\n\n<li>spacious chamber for 3D objects<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Processing temperature<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>50 \u2013 450\u00b0C<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Turnkey processes<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Al<sub>2<\/sub>O<sub>3<\/sub>, TiO<sub>2<\/sub>, ZnO, AZO, laminate combinations<\/li>\n\n\n\n<li>many other processes accessible upon request<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Precursors<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Liquid, solid, gas<\/li>\n\n\n\n<li>Up to 3 sources<\/li>\n<\/ul>\n","protected":false},"author":2,"featured_media":245,"template":"","meta":{"_acf_changed":false,"cu_people_first_name":"Thermal","cu_people_last_name":"ALD","cu_people_initials":"","footnotes":"","_links_to":"","_links_to_target":""},"cu_people_type":[],"cu_people_expertise":[],"class_list":["post-241","cu_people","type-cu_people","status-publish","has-post-thumbnail","hentry"],"acf":{"cu_people_job_title":"","cu_people_degree":"","cu_building":false,"cu_people_office_num":"","cu_people_pronoun":"none","cu_people_designation":"","cu_people_email":"","cu_people_phone":"","cu_people_phone_ext":"","cu_people_linkedin":"","cu_people_bluesky":"","cu_people_twitter":"","cu_people_instagram":"","cu_people_facebook":"","cu_people_website":"https:\/\/www.picosun.com\/","cu_people_orcid":""},"_links":{"self":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu_people\/241","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu_people"}],"about":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/types\/cu_people"}],"author":[{"embeddable":true,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/users\/2"}],"version-history":[{"count":3,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu_people\/241\/revisions"}],"predecessor-version":[{"id":247,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu_people\/241\/revisions\/247"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/media\/245"}],"wp:attachment":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/media?parent=241"}],"wp:term":[{"taxonomy":"cu_people_type","embeddable":true,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu_people_type?post=241"},{"taxonomy":"cu_people_expertise","embeddable":true,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu_people_expertise?post=241"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}