CU Nanofab

This laboratory is a joint effort between the Faculty of Science and the Faculty of Engineering and Design. We design and fabricate a variety of organic and inorganic surfaces with specific materials, nanofeatures, or other characteristics. Our laboratory works in collaboration with several industrial and academic partners, as well as providing for-fee fabrication services and consultation.

We are closely integrated with the Carleton University MicroFabrication Facility and so have access to a full CMOS fabrication line, including lithography.

Tools and Services

• Chemical Synthesis
• Thermal Characterization
• Film characterization (EDX and AFM)
• Thin Film Deposition
  • Chemical Vapour Deposition (CVD)
  • Atomic Layer Deposition (ALD)
  • Physical Vapor Deposition (COVAP)
• Nearby access to collaborative resources, including spectrocscopic ellipsometry, TEM, BET