Carleton University Nanofab logo

This laboratory is a joint effort between the Faculty of Science and the Faculty of Engineering and Design. We design and fabricate a variety of organic and inorganic surfaces with specific materials, nanofeatures, or other characteristics. Our laboratory works in collaboration with several industrial and academic partners, as well as providing for-fee fabrication services and consultation.

We are closely integrated with the Carleton University MicroFabrication Facility and so have access to a full CMOS fabrication line, including lithography.

Tools and Services

  • Chemical Synthesis
  • Thermal Characterization
  • Film characterization (EDX and AFM)
  • Thin Film Deposition
    • Chemical Vapour Deposition (CVD)
    • Atomic Layer Deposition (ALD)
    • Physical Vapor Deposition (COVAP)
  • Nearby access to collaborative resources, including spectrocscopic ellipsometry, TEM, BET