![Photo of Angstrom COVAP Photo of Angstrom COVAP](https://carleton.ca/nanofab/wp-content/uploads/COVAP-e1578607519967-200x200.jpg)
Angstrom COVAP
Website: | Angstrom Engineering |
The Angstrom Covap PVD platform offers a compact, robust solution for many process applications. Deposition sources are isolated to reduce thermal effects and cross contamination.
Integrated into a dedicated MBraun drybox, the COVAP produces repeatable, high quality PVD thin films of elemental materials, compounds, and alloys.
Four sources are available for sequential or co-deposition recipes, with deposition rates calibrated by in-situ quartz crystal microbalances (QCMs).
The tool can accommodate substrate sizes of up to 100 mm in diameter.