I am a chemistry professor who was trained in synthetic chemistry by Darrin Richeson at the University of Ottawa (PhD) and then spent several years working with Roy Gordon at Harvard (PDRA), where I became interested in ALD.
My interests are in the thermal mechanisms of decomposition and surface reactivity. My research group commonly studies metal depositions but has looked at many different processes and precursors across the periodic table.
I wrote a book:
Chemistry of ALD – A Textbook
I hope it to be the backbone of a course on ALD chemistry; it isn’t comprehensive with respect to precursors or surface chemistry but rather goes through the core concepts of understanding ALD from a chemistry point of view.
|Green Chemistry – Henrik Pedersen, Jonas Sundqvist, and I wrote a perspective on “Green CVD”, and Beneq interviewed us about it:|
|Gold Deposition – after we discovered a gold metal ALD process, the People Behind the Science podcast interviewed me. It is a “free-range” discussion of my life, influences, and science:|
Carleton University, Department of Chemistry
University of Ottawa, Department of Chemistry