Professor, #BarryLab; Director, CU Nanofab
|Degrees:||BSc (Queen's, 1992), PhD (uOttawa, 1996)|
|Phone:||613-520-2600 x 2244|
I am a chemistry professor who was trained in synthetic chemistry by Darrin Richeson at the University of Ottawa (PhD) and then spent several years working with Roy Gordon at Harvard (PDRA), where I became interested in ALD.
My interests are in the thermal mechanisms of decomposition and surface reactivity. My research group commonly studies metal depositions but has looked at many different processes and precursors across the periodic table.
I wrote a book:
Chemistry of ALD – A Textbook
I hope it to be the backbone of a course on ALD chemistry; it isn’t comprehensive with respect to precursors or surface chemistry but rather goes through the core concepts of understanding ALD from a chemistry point of view.
|Chemistry of Atomic Layer Deposition (unofficial book launch) – I was invited by Riikka Puurunen to present some of the textbook I wrote at an ALD networking day in Espoo, Finland:|
|Green Chemistry – Henrik Pedersen, Jonas Sundqvist, and I wrote a perspective on “Green CVD”, and Beneq interviewed us about it:|
|Gold Deposition – after we discovered a gold metal ALD process, the People Behind the Science podcast interviewed me. It is a “free-range” discussion of my life, influences, and science:|
|I also talked to the STG Podcast at Aalto University:
| Copper Precursors: In 2013, we discovered and patented a series of copper precursors, and opened the nanofab. I talked to “ALD Pulse”, a youtube channel, about this:
Carleton University, Department of Chemistry
University of Ottawa, Department of Chemistry