Microfabrication Lab Subscription Plan – Metrology

Membership Description

Metrology Membership ($1,000/year)	Cost Breakdown
Users Covered	1 user
Included Access	100 hours/year
Equipment Access	Metrology Tools Only (100 hours/year included)
Technician Time	None Included
Additional Access	$40/hour (Metrology only)
Additional Tech Time	$150/hour
Booking Priority	Up to 2 weeks
Training/Onboarding	$250/user
Lab Supplies Credit	Pay per use
Material Costs	Metrology Tier Rates Apply (See Table Below)
Additional Users	$500 each

Available Equipment

Premium Tool List

Trion PECVD system
Bruce LPCVD Furnace
Bruce Oxidation Furnace
Bruce PoCl diffusion furnace
Bruce H2 Furnace Anneals
Inert Bruce Furnace Anneals
Semicore PVD dep

Standard Tool List

Balzers Ebeam/Thermal evaporator
Covap Thermal Evaporator
Trion ICP etcher
MRC RIE Etcher
Technics Plasma Etchers
Tepla O2 Asher
Plasma Preen O2 Asher
Chemical Wetbenches
Photolithography tools
Wirebonding tools
Ag RTA system

Metrology/Characterization Tools

Woollam Spectroscopic Ellipsometer
Tencor P17 Profilometer/Stress
Dektak Profilometer
Thermo Fisher FTIR
Bruker AFM
Optical Microscopes
Nanospec ellipsometer
4-point probe
Semetrol DLTS
Probe Stations
Metricon Prism Coupler

Equipment/Tool Rates By Tier

Rates apply once included subscription hours/credits are exceeded. Rates shown are for Internal Academic users and are subject to user type multipliers (External Academic: 1.5x, Industrial: 2x).

Internal Supplies/Material Costs by Tier

Costs shown vary by subscription tier only and apply to all user types.

All prices are in CAD and subject to change. Subscription fees are base rates for internal academic users at Carleton University.

External academic users are subject to a 1.5x multiplier on Subscription Fees & Equipment Rates. Industrial users are subject to a 2x multiplier on Subscription Fees & Equipment Rates.

Material costs vary by subscription tier only. Specialty service pricing (e.g., Prefurnace Clean, Hazardous Waste Disposal) available upon request.