MicroFabrication Facility

Carleton University’s MicroFabrication Facility (CUMFF) is a flexible facility for manufacturing silicon integrated circuits and devices in support of research on process technology, device physics and modelling, innovative circuit techniques, photonics, biomedical devices, and microelectromechanical systems (MEMS). The facility was opened in 1993 as part of the new Minto Center for Advanced Studies in Engineering, and is the result of over 25 years of experimental research in semiconductor devices at Carleton.

A notable strength of the facility is in MOS processing; MOS gate dielectrics can be produced with contamination at industrially acceptable levels. To illustrate this capability, it is worth noting that every year the CUMFF is used in a quasi-production mode to fabricate a multi project chip in 5 micron LOCOS-isolated polysilicon gate nMOS technology containing designs submitted as a coursework project by fourth year students. These designs typically contain 50 to 100 transistors. Working chips are returned for testing within approximately three weeks of submission of CAD files, and wafer-level probing usually indicates yields of over 80% for the circuits.

Further information is available on:

• Microfabrication Facility Info Pamphlet
• Research projects recently completed or underway in the CUMFF
• Equipment and process capability
• MicroFabrication Facility Internal Academic Access Fees
• MicroFabrication Facility External Academic Access Fees
• MicroFabrication Facility Industry Access Fees
• Microfabrication Facility User and Safety Manual
• Fabrication Booking System
• Access for external users
• CMC MNT Portal
• Oxidation and Diffusion